Welcome to the website of Professor Farrokh Ayazi's research group in the School of Electrical and Computer Engineering at the Georgia Institute of Technology. Research in the Integrated MEMS Laboratory relates to the design, analysis, fabrication, and characterization of Micro and Nano Electro-Mechanical Systems (MEMS and NEMS), with a focus on high Q resonators and resonant gyroscopes. High Q resonators have applications in 'mixed-domain microsystems' such as gyroscopes and accelerometers, low jitter clocks, energy harvesters, biochemical sensors for health and environmental monitoring, as well as wireless communications. On the system side, the group specializes on advance interface circuits and architectures for MEMS and Sensors. 

The Integrated MEMS Laboratory (IMEMS) is a unit member of the Center for MEMS and Microsystems Technologies (CMMT) and of the Institute for Electronics and Nanotechnology at Georgia Tech. 

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Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices

Diego E. Serrano, Mohammad F. Zaman, Amir Rahafrooz, Peter Hrudey, Ron Lipka, Duane Younkin, Shin Nagpal, Ijaz Jafri & Farrokh Ayazi

This paper reports on a new type of high-frequency mode-matched gyroscope with significantly reduced dependencies on environmental stimuli such as temperature, vibration, and shock. A novel stress-isolation system is used to effectively decouple an axis-symmetric bulk-acoustic wave (BAW) vibratory gyro from its substrate, minimizing the effect that external sources of error have on the offset and scale factor of the device.

Microsystems & Nanoengineering 2, Article number: 16015 (2016)