Publications & Patents

Journal Publications

  1. N. Yazdi, F. Ayazi, and K. Najafi, “Micromachined Inertial Sensors,” Invited paper, Proceedings of the IEEE, Aug. 1998, pp. 1640-1659.
  2. F. Ayazi and K. Najafi, “High Aspect-Ratio Combined Poly and Single-Crystal Silicon (HARPSS) MEMS Technology,” IEEE Journal of Microelectromechanical Systems, vol. 9, Sept. 2000, pp. 288-294.
  3. F. Ayazi and K. Najafi, “High Aspect-Ratio Polysilicon Micromachining Technology,” Sensors and Actuators A, Vol. 87, Dec. 2000, pp. 46-51.
  4. F. Ayazi and K. Najafi, “A HARPSS Polysilicon Vibrating Ring Gyroscope,” IEEE Journal of Microelectromechanical Systems, vol. 10, June 2001, pp. 169-179.
  5. F. Ayazi, “The HARPSS Process for Fabrication of Precision MEMS Inertial Sensors,” Mechatronics 12 (2002), Nov. 2002, pp. 1185-1199, Elsevier Science Ltd.
  6.  S. Pourkamali, A. Hashimura, R. Abdolvand, G. Ho, A. Erbil, and F. Ayazi, “High-Q Single Crystal Silicon HARPSS Capacitive Beam Resonators with Sub-micron Transduction Gaps,” IEEE Journal of Microelectromechanical Systems, Vol. 12, No. 4, August 2003, pp. 487-496.
  7. Z. Hao, A. Erbil, and F. Ayazi, “An Analytical Model for Support Loss in Micromachined Beam Resonators with In-plane Flexural Vibrations,” Sensors and Actuators A, Vol. 109, Dec. 2003, pp.156-164.
  8. G. Piazza, R. Abdolvand, G. Ho, and F. Ayazi, “Piezoelectrically-Transduced, Capacitively-Tuned, High-Q Single-Crystal Silicon Micromechanical Resonators on SOI Wafers,” Sensors and Actuators A, Vol. 111, N1, March 2004, pp. 71-78.
  9. Z. Hao, S. Pourkamali, and F. Ayazi, “VHF Single Crystal Silicon Elliptic Bulk-Mode Capacitive Disk Resonators; Part I: Design and Modeling,” IEEE Journal of Microelectromechanical Systems, Vol. 13, No. 6, Dec. 2004, pp. 1043-1053.
  10. S. Pourkamali, Z. Hao, and F. Ayazi, “VHF Single Crystal Silicon Elliptic Bulk-Mode Capacitive Disk Resonators; Part II: Implementation and Characterization,” IEEE Journal of Microelectromechanical Systems, Vol. 13, No. 6, Dec. 2004, pp. 1054-1062.
  11. B.V. Amini and F. Ayazi, “A 2.5V 14-bit Sigma-Delta CMOS-SOI Capacitive Accelerometer,” IEEE Journal of Solid State Circuits, Dec. 2004, pp. 2467-2476.
  12. S. Pourkamali and F. Ayazi, “Electrically Coupled MEMS Bandpass Filters; Part I: With Coupling Element,” Sensors and Actuators A, Aug. 2005, pp. 307-316.
  13. S. Pourkamali and F. Ayazi, “Electrically Coupled MEMS Bandpass Filters; Part II: Without Coupling Element,” Sensors and Actuators A, Aug. 2005, pp. 317-325.
  14. B.V. Amini and F. Ayazi, "Micro-Gravity Capacitive Silicon-On-Insulator Accelerometers," Journal of Micromechanics and Microengineering, Vol. 15, No. 11, Oct. 2005, pp. 2113-2120.
  15. M. Rais-Zadeh and F. Ayazi, "Characterization of High-Q Spiral Inductors on Thick Insulator-On-Silicon," Journal of Micromechanics and Microengineering, Vol. 15, Sept. 2005, pp. 2105-2112.
  16. P. Monajemi and F. Ayazi, “Design Optimization and Implementation of a Micro-Gravity Capacitive HARPSS Accelerometer,” IEEE Sensors Journal, vol. 6, issue 1, Feb 2006, pp. 39-46.
  17. K. Sundaresan, P.E. Allen, and F. Ayazi, “Process and temperature compensation in a 7MHz CMOS clock oscillator,” IEEE Journal of Solid-State Circuits, vol. 41, no. 2, Feb. 2006, pp. 433-441.
  18. P. Monajemi, P. Joseph, P. A. Kohl, and F. Ayazi, "Wafer-Level Packaging of MEMS via Thermally Released Metal-Organic Membranes," Journal of Micromechanics & Microengineering, vol. 16, March 2006, pp. 742-750.
  19. R. Abdolvand, H. Johari, G.K. Ho, A. Erbil, and F. Ayazi, “Quality factor in trench-refilled polysilicon beam resonators,” IEEE Journal of Microelectromechanical Systems, vol.15, no.3, June 2006, pp. 471- 478.
  20. R. Abdolvand and F. Ayazi, “A gap reduction and manufacturing technique for thick oxide mask layers with multiple-size sub-µm openings,” IEEE Journal of Microelectromechanical Systems, vol.15, no.5, Oct. 2006, pp. 1139- 1144.
  21. B.V. Amini, R. Abdolvand, and F. Ayazi, “A 4.5mW closed-loop delta-sigma micro-gravity CMOS-SOI accelerometer,” IEEE Journal of Solid State Circuits, Vol. 41, No. 12, Dec. 2006, pp. 2983-2991.
  22. Z. Hao and F. Ayazi, “Support Loss in the Radial Bulk-mode Vibrations of Center-supported Micromechanical Disk Resonators,” Sensors and Actuators A: Physical, Volume 134, Issue 2, 15 March 2007, pp. 582-593.
  23. P. Joseph, P. Monajemi, F. Ayazi, and P. A. Kohl, “Wafer-Level Packaging of Micromechanical Resonators,” IEEE Trans. on Advanced Packaging, Vol. 30, No.1, Feb 2007, pp. 19-26.
  24. K. Sundaresan, G.K. Ho, S. Pourkamali, and F. Ayazi, “Electronically temperature compensated Silicon bulk acoustic resonator reference oscillators,” IEEE Journal of Solid-State Circuits, Vol. 42, No. 6, June 2007, pp. 1425-1434.
  25. Sharma, M.F. Zaman, and F. Ayazi, “A 104dB Dynamic Range Transimpedance-Based CMOS ASIC for Tuning Fork Microgyroscopes,” IEEE Journal of Solid-State Circuits, Vol. 42, No. 8, Aug. 2007, pp. 1790-1802.
  26. S. Pourkamali, G. K. Ho, and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators - Part I: Concept and Fabrication” IEEE Transactions on Electron Devices, May 2007, Vol. 54, No. 8, Aug. 2007, pp. 2017-2023.
  27. S. Pourkamali, G. K. Ho, and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators - Part II: Measurement and Characterization,” IEEE Transactions on Electron Devices, Vol. 54, No. 8, Aug. 2007, pp. 2024-2030.
  28. R. Abdolvand, B.V. Amini, and F. Ayazi, “Sub-micro-gravity in-plane accelerometers with reduced capacitive gaps and extra seismic mass,” IEEE Journal of Microelectromechanical Systems, Vol. 16, Oct. 2007, pp. 1036-1043.
  29. M. Rais-Zadeh, P. A. Kohl, and F. Ayazi, “MEMS Switched Tunable Inductors,” IEEE/ASME Journal of Microelectromechanical Systems, Vol. 17, No. 1, Feb. 2008, pp. 78-84.
  30. G. K. Ho, R. Abdolvand, A. Sivapurapu, S. Humad, and F. Ayazi, "Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators," IEEE Journal of Microelectromechanical Systems, Vol. 17, No. 2, April 2008, pp. 512-520.
  31. M. Rais-Zadeh, J. Laskar, and F. Ayazi, “High performance inductors on CMOS-grade trenched silicon substrate,” IEEE Transaction on Components and Packaging Technology, Vol. 39, March 2008, pp. 126-134.
  32. R. Abdolvand and F. Ayazi, “An Advanced Reactive Ion Etching Process for Very-High Aspect-Ratio Sub-Micron Wide Trenches in Silicon,” Sensors and Actuators A: Physical, Volume 144, Issue 1, May 2008, pp. 109-116.
  33. J. Fang, J. Fu, and F. Ayazi, “Metal-organic thin-film encapsulation for MEMS,” Journal of Micromechanics & Microengineering, Vol. 18, No. 10, October 2008, pp. 1-8.
  34. M.F. Zaman, A. Sharma, Z. Hao, and F. Ayazi, “A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope with Subdegree-Per-Hour Allan Deviation Bias Instability,” IEEE Journal of Microelectromechanical Systems, Vol. 17, Issue 6, December 2008, pp. 1526-1536.
  35. R. Abdolvand, H. Mirilavasani, G.K. Ho, and F. Ayazi, “Thin-Film Piezoelectric-on-Silicon Resonators for High-Frequency Reference Oscillator Applications,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Volume 55, Issue 12, December 2008, pp. 2596-2606.
  36. A. Sharma, M.F. Zaman, and F. Ayazi, “A 0.1º/hr Bias Drift Micromechanical Silicon Gyroscope with Automatic CMOS Mode-Matching,” IEEE Journal of Solid-State Circuits, Vol. 44, No. 5, May 2009, pp. 1593-1608.
  37. M.F. Zaman, A. Sharma, and F. Ayazi, “The Resonating Star Gyroscope: Implementation of a Novel Multiple-Shell Gyroscope with sub-5 deg/hr Allan Deviation Bias Instability,” IEEE Sensors Journal, Vol. 9, No. 6, June 2009, pp. 616-624.
  38. R. Abdolvand and F. Ayazi, “High Frequency Monolithic Thin-Film Piezoelectric-on-Substrate Filters,” International Journal of Microwave and Wireless Technologies, Vol. 1, Issue 1, May 2009, pp. 29-35.
  39. M. Rais-Zadeh, A. Kapoor, and F. Ayazi, “Fully integrated low-loss band-pass filters for wireless applications,” Journal of Micromechanics and Microengineering, Vol. 15, No. 8, July 2009, pp. 1-8.
  40. M. Rais-Zadeh, H. M. Lavasani, and F. Ayazi “An Integrated 800MHz Coupled Resonator Tunable Bandpass Filter in Silver with a Constant Bandwidth,” IEEE Journal of Microelectromechanical Systems, Vol. 18, Issue 3, August 2009, pp. 942-949.
  41. H. Johari and F. Ayazi, “High-Density Embedded Deep Trench Capacitors in Silicon with Enhanced Breakdown Voltage,” IEEE Transaction on Components and Packaging Technology, Vol. 32, No. 4, Dec. 2009, pp. 808-816.
  42. G.K. Ho, K. Sundaresan, S. Pourkamali, and F. Ayazi, “Micromechanical IBARs: Tunable High-Q Resonators for Temperature-Compensated Reference Oscillators,” IEEE Journal of Microelectromechanical Systems, Vol. 19, Issue 3, June 2010, pp. 503-515.
  43. G.K. Ho, J. K. C. Perng, and F. Ayazi, “Micromechanical IBARs: Modeling and Process Compensation,” IEEE Journal of Microelectromechanical Systems, Vol. 19, Issue 3, June 2010, pp. 516-525.
  44. G. Casinovi, X. Gao, and F. Ayazi, “Lamb Waves and Resonant Modes in Rectangular Bar Silicon Resonators,”  IEEE Journal of Microelectromechanical Systems, Vol. 19, Issue 4, August 2010, pp. 827 – 839.
  45. H. M. Lavasani, W. Pan, B. Harrington, R. Abdolvand, and F. Ayazi, “A 76dBΩ 1.7GHz 0.18μm CMOS Tunable TIA Using Broadband Current Pre-Amplifier for High Frequency Lateral MEMS Oscillators,” IEEE Journal of Solid-State Circuits, Vol. 46, No. 1, January 2011, pp. 224-235.
  46. A. K. Samarao and F. Ayazi, “Postfabrication Electrical Trimming of Silicon Micromechanical Resonators via Joule Heating,” IEEE Journal of Microelectromechanical Systems, Vol. 20, Issue 5, October 2011, pp. 1081 – 1088.
  47. A. K. Samarao and F. Ayazi, “Temperature Compensation of Silicon Resonators via Degenerate Doping,” IEEE Transactions on Electron Devices, Vol. 59, No. 1, January 2012, pp. 87 – 93.
  48. D. E. Serrano, R. Tabrizian, and F. Ayazi, “Electrostatically Tunable Piezoelectric-on-Silicon Micromechanical Resonator for Real Time Clock,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 59, No. 3, March 2012, pp. 358-365.
  49. H. M. Lavasani, W. Pan, B. Harrington, R. Abdolvand, and F. Ayazi, “Electronic Temperature Compensation of Lateral Bulk Acoustic Resonator Reference Oscillators using Enhanced Series Tuning Technique,” IEEE Journal of Solid-State Circuits, Vol. 47, No. 6, March 2012, pp. 1381-1393.
  50. M. Pardo, L. Sorenson, and F. Ayazi, “An Empirical Phase-Noise Model for MEMS Oscillators Operating in Nonlinear Regime,” IEEE Transactions on Circuits and Systems I, Vol. 59, No. 5, May 2012, pp. 979-988.
  51. W. Pan, V. A. Thakar, M. Rais-Zadeh, and F. Ayazi, "Acoustically coupled thickness-mode AlN-on-Si bandpass filters, Part I: principle and devices," IEEE Trans. Ultrasonics, Ferroelectrics and Frequency Control, Vol. 59, No. 10, Oct. 2012, pp. 2262-2269.
  52. V. A. Thakar, W. Pan, F. Ayazi, and M. Rais-Zadeh, "Acoustically coupled thickness-mode AlN-on-Si bandpass filters, Part II: simulation and analysis," IEEE Trans. Ultrasonics, Ferroelectrics and Frequency Control, Vol. 59, No. 10, Oct. 2012, pp. 2270-2277.
  53. R. Tabrizian, G. Casinovi, and F. Ayazi, “Temperature-Stable Silicon-Oxide (SilOx) Micromechanical Resonators,” IEEE Transactions on Electron Devices, Vol. 60, No. 8, August 2013, pp. 2656-2663.
  54. R. Tabrizian, M. Hodjat-Shamami and F. Ayazi, “High-Frequency AlN-on-Silicon Resonant Square Gyroscopes,” IEEE Journal of Microelectromechanical Systems, Vol. 22, Issue 5, October 2013, pp. 1007 – 1009.
  55. J. L. Fu, R. Tabrizian, and F. Ayazi, “Dual-Mode AlN-on-Silicon Micromechanical Resonators for Temperature Sensing,” IEEE Transactions on Electron Devices, Vol. 61, No. 2, February 2014, pp. 591-597.
  56. M. Pardo and F. Ayazi, “A Band-Reject Nested-PLL Clock Cleaner using a Tunable MEMS Oscillator,” IEEE Transactions on Circuits and Systems I, Vol. 61, No. 3, March 2014, pp. 653-662.
  57. P. Shao, C. Mayberry, X. Gao, V. Tavassoli, and F. Ayazi, “A Polysilicon Microhemispherical Resonating Gyroscope,” IEEE/ASME Journal of Microelectromechanical Systems, Vol. 23, No. 4, August 2014, pp. 762-764.
  58. A. N. Shirazi, M. F. Zaman, and F. Ayazi, “A Digital Phase Demodulation Technique for Resonant MEMS Gyroscopes,” IEEE Journal of Sensors, Vol. 14, No. 9, September 2014, pp. 3260-3266.
  59. B. Hamelin, V. Tavassoli, and F. Ayazi, “Localized Eutectic Trimming of Polysilicon Microhemispherical Resonating Gyroscope,” IEEE Journal of Sensors, Vol. 14, No. 10, October 2014, pp. 3498-3505.
  60. A. N. Shirazi, M. Hodjat-Shamami, R. Tabrizian, and F. Ayazi, “Dynamic Tuning of MEMS Resonators via Electromechanical Feedback,” IEEE Trans. Ultrasonics, Ferroelectrics and Frequency Control, Vol. 62, No. 1, January 2015, pp. 129-137.
  61. L. Sorenson, P. Shao and F. Ayazi, “Bulk and Surface Thermoelastic Dissipation in Micro-Hemispherical Shell Resonators,” IEEE/ASME Journal of Microelectromechanical Systems, Vol. 24, No. 2, April 2015, pp. 486 – 502.
  62. J. L. Fu and F. Ayazi, “High-Q AlN-on-Silicon Resonators with Annexed Platforms For Portable Integrated VOC Sensing,” IEEE/ASME Journal of Microelectromechanical Systems, Vol. 24, No. 2, April 2015, pp. 503 – 509.
  63. H. M. Lavasani, R. Abdolvand, and F. Ayazi, “Single-Resonator Dual-Frequency AlN-on-Si MEMS Oscillator,” IEEE Trans. Ultrasonics, Ferroelectrics and Frequency Control, Vol. 62, No. 5, May 2015, pp. 802-813.
  64. P. Shao, V. Tavassoli, C. Mayberry, and F. Ayazi, “A 3D-HARPSS Polysilicon Microhemispherical Shell Resonating Gyroscope: Design, Fabrication, and Characterization,” IEEE Journal of Sensors, Vol. 15, No. 9, September 2015, pp. 4974-4985.
  65. R. Tabrizian and F. Ayazi, “Thermo-acoustic engineering of silicon microresonators via evanescent waves,” Applied Physics Letters 106, 263504 (2015).
  66. A. Mirbeik, V. Tavassoli, F. Ayazi, and N. Tavassolian “Three Dimensional, Ultra-Wideband Micromachined Millimeter-Wave Hemispherical Shell Antenna: Theoretical Concept and Calibration,” IET Microwaves, Antennas & Propagation, January 2016, pp. 1-11.
  67. G. Casinovi, A. N. Shirazi, M. Dalal, and F. Ayazi, “Gyroscope Sensing and Self-Calibration Architecture Based on Signal Phase Shift,”  Sensors and Actuators A: Physical, Volume 241, Issue 1, April 2016, pp. 1-11
  68. R. Tabrizian, A. Daruwalla, F. Ayazi, “High-Q trapping of temperature-stable phonons with Lamé cross-sectional polarization in a single crystal silicon waveguide,” Applied Physics Letters 108, 113503 (2016).
  69. D. E. Serrano, Mohammad Zaman, Amir Rahafrooz, Ron Lipka, Peter Hrudey, Duane Younkin, Shin Nagpal, Ijaz Jafri, and F. Ayazi, “Substrate-Decoupled Bulk Acoustic Wave Gyroscopes: Design & Evaluation of Next Generation Environmentally-Robust Devices,” submitted, Microsystems & Nanoengineering (nature publishing), 2016.

Conference Publications

  1. A. Selvakumar, F. Ayazi, and K. Najafi, “A High Sensitivity Z-Axis Torsional Silicon Accelerometer,” Tech. Dig. IEEE Int. Electron Devices Meeting (IEDM 1996), San Francisco, CA, Dec. 1996, pp. 765-768.
  2. F. Ayazi and K. Najafi, “Design and Fabrication of a High-Performance Polysilicon Vibrating Ring Gyroscope,” Proc. IEEE International Micro Electro Mechanical Systems Conference (MEMS‘98), Heidelberg, Germany, Feb. 1998, pp. 621-626.
  3. F. Ayazi and K. Najafi, “High Aspect-Ratio Polysilicon Micromachining Technology,” Proc. 10th Int. Conf. Solid-State Sensors and Actuators (Transducers’99), Sendai, Japan, June 1999, pp. 320-323.
  4. F. Ayazi, H.H. Chen, and K. Najafi, “A High Performance Vibratory Silicon Microgyroscope,” Proc. Sixth Annual Strategic and Technical Symposium "Vehicle Displays and Microsensors '99", Ypsilanti, MI, Sept. 1999, pp. 153-157.
  5. D. Aslam, V. Papageorgiou, F. Ayazi, and K. Najafi, “IC-Compatible Technology of Poly-Diamond MEMS,” Proc. Sixth Annual Strategic and Technical Symposium "Vehicle Displays and Microsensors '99", Ypsilanti, MI, Sept. 1999, pp. 113-116.
  6. F. Ayazi and K. Najafi, “High Aspect-Ratio Dry-Release Poly-Silicon MEMS Technology for Inertial-Grade Microgyroscopes,” Proc. IEEE 2000 Position Location and Navigation Symposium (PLANS 2000), San Diego, CA, March 2000, pp. 304-308.
  7. F. Ayazi, H.H. Chen, F. Kocer, G. He, and K. Najafi, “A High Aspect-Ratio Polysilicon Vibrating Ring Gyroscope,” Tech. Dig. Solid-State Sensors & Actuators Workshop, Hilton Head, SC, June 2000, p. 289-292.
  8. F. Ayazi, “High Aspect-Ratio Poly-Silicon MEMS Technology for Precision Inertial Sensors,” Invited Paper, Proc. 7th Mechatronics Forum International Conference, Atlanta, GA, Sept. 2000.
  9. S.Y. No and F. Ayazi, “The HARPSS Process for Fabrication of Nano-Precision Silicon Electromechanical Resonators,” Proc. IEEE 2001 Conf. on Nanotechnology (IEEE NANO’01), Maui, HI, Oct. 2001, pp. 489-494.
  10. R. Tummala, S. Bhattacharya, S. Dalmia, P. M. Raj, T. Ogawa, S.H. Lee, R. Mani, D. Balaraman, A. Bavisi, F. Ayazi, M. Swaminathan, A. Erbil, “Recent Advances in Integral Passive Research at Georgia Tech,” in Proc. IMAPS 2002 International Conference on Electronic Packaging (ICEP), Tokyo, Japan, April 2002.
  11. S. Dalmia, S.H. Lee, S. Bhattacharya, F. Ayazi, and M. Swaminathan, “High-Q RF Passives on Organic Substrates Using a Low-Cost Low-Temperature Laminate Process,” in Proc. 2002 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2002), Cannes, France, May 2002, pp. 660-669.
  12. S. Dalmia, J.M. Hobbs, V. Sundaram, M. Swaminathan, S.H. Lee, F. Ayazi, G. White, and S. Bhattacharya, “Design and Optimization of High-Q RF Passives on SOP-Based Organic Substrates,” in Proc. 2002 Electronic Components and Technology Conference, San Diego, CA, May 2002, pp. 495-503.
  13. D. Balaraman, S. Bhattacharya, F. Ayazi, and J. Papapolymerou, “Low Cost Low Actuation Voltage Copper RF MEMS Switches,” in Dig. 2002 IEEE MTT-S International Microwave Symposium (IMS 2002), Seattle, WA, June 2002, pp. 1225-1228.
  14. S. Dalmia, F. Ayazi, M. Swaminathan, S.H. Min, S.H. Lee, W. Kim, D.S. Kim, S. Bhattacharya, V. Sundaram, G. White, and R. Tummala, “Design of Inductors in Organic Substrates For 1-3 GHz Wireless Applications,” in Dig. 2002 IEEE MTT-S International Microwave Symposium (IMS 2002), Seattle, WA, June 2002, pp. 1405-1408.
  15. S.H. Lee, S. Min, D.S. Kim, S. Dalmia, W. Kim, V. Sundaram, S. Bhattacharya, G. White, F. Ayazi, J.S. Kenney, M. Swaminathan, and R. Tummala, “High Performance Spiral Inductors Embedded in Organic Substrates for SOP Applications,” in Dig. 2002 IEEE MTT-S International Microwave Symposium (IMS 2002), Seattle, WA, June 2002, pp. 2229-2232.
  16. S.Y. No, A. Hashimura, S. Pourkamali, and F. Ayazi, “Single-Crystal Silicon HARPSS Capacitive Resonators with Submicron Gap-Spacing,” Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, June 2002, pp. 281-284.
  17. S. Pourkamali, R. Abdolvand, and F. Ayazi, “A 600kHz Electrically Coupled MEMS Bandpass Filter,” Proc. IEEE International Micro Electro Mechanical Systems Conference (MEMS‘03), Kyoto, Japan, Jan. 2003, pp. 702-705.
  18. G. Piazza, R. Abdolvand, and F. Ayazi, “Voltage-Tunable, Piezoelectrically-Transduced, Single-Crystal Silicon Resonators on SOI Substrates,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘03), Kyoto, Japan, Jan. 2003, pp. 149-152.
  19. K. Sundaresan, K. Brouse, K. U-Yen, F. Ayazi, and P. Allen, “A 7-MHz Process, Temperature and Supply Compensated Clock Oscillator in 0.25 CMOS,” Proc. 2003 IEEE International Symposium on Circuits and Systems (ISCAS 2003), Bangkok, Thailand, May 2003, pp. 693-696.
  20. S. Pourkamali and F. Ayazi, "SOI-Based HF and VHF Single-Crystal Silicon Resonators with Sub-100 Nanometer Vertical Capacitive Gaps," Digest of the 12th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers'03), Boston, MA, June 8-12, 2003, pp. 837-840.
  21. R. Abdolvand, G.K. Ho, A. Erbil, and F. Ayazi, "Thermoelastic Damping in Trench-Refilled Polysilicon Resonators," Digest of the 12th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers'03), Boston, MA, June 8-12, 2003, pp. 324-327.
  22. A. Bavisi, S. Dalmia, M. Swaminathan, and F. Ayazi, “A 802.11a WLAN Oscillator with High Q Embedded Passives on Laminate-Type Organic Package,” 2003 IEEE Topical Conference on Wireless Communication Technology, Honolulu, Hawaii, Oct. 2003, pp. 166-167.
  23. G. Wang, A. Bacon, R. Abdolvand, F.  Ayazi, J.  Papapolymerou, and E. Tentzeris, “Finite Ground Coplanar Lines on CMOS Grade Silicon with a Thick Embedded Silicon Oxide Layer Using Micromachining Techniques,” 33rd European Microwave Conference, Vol. I, October 2003, pp. 25-27.
  24. S. Humad, R. Abdolvand, G.K. Ho, G. Piazza, and F. Ayazi, “High Frequency Micromechanical Piezo-On-Silicon Block Resonators,” Tech. Dig. IEEE Int. Electron Devices Meeting (IEDM 2003), Washington, DC, Dec. 2003, pp. 957-960.
  25. G.K. Ho, R. Abdolvand, and F. Ayazi, “Through-Support-Coupled Micromechanical Filter Array,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘04), Maastricht, the Netherlands, Jan. 2004, pp. 769-772.
  26. S. Pourkamali and F. Ayazi, “Fully Single Crystal Silicon Resonator with Deep-Submicron Dry-Etched Transducer Gaps,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘04), Maastricht, the Netherlands, Jan. 2004, pp. 813-816.
  27. S. Pourkamali, R. Abdolvand, G.K. Ho, and F. Ayazi, “Electrostatically Coupled Micromechanical Beam Filters,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘04), Maastricht, the Netherlands, Jan. 2004, pp. 584-587.
  28. B. V. Amini, S. Pourkamali, and F. Ayazi, “A High Resolution Stiction-less CMOS Compatible SOI Accelerometer with a Low Noise, Low Power, 0.25µm CMOS Interface,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘04), Maastricht, the Netherlands, Jan. 2004, pp. 572-575.    
  29. B. V. Amini, S. Pourkamali, and F. Ayazi, “A 2.5V 14bit Sigma-Delta CMOS-SOI Capacitive Accelerometer,” Tech. Dig. IEEE International Solid-State Circuits Conference (ISSCC 2004), San Francisco, CA, Feb. 2004, pp. 314-315.
  30. R. Abdolvand, G. K. Ho, and F. Ayazi, “Poly-Wire-Coupled Single Crystal Silicon HARPSS Micromechanical Filters Using Oxide Islands,” Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, June 2004, pp. 242-245
  31. S. Pourkamali and F. Ayazi, “18μm Thick High Frequency Capacitive HARPSS Resonators with Reduced Motional Resistance,” Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, June 2004, pp. 392-393.
  32. M.F. Zaman, A. Sharma, B. V. Amini, and F. Ayazi, “Towards Inertial Grade Vibratory Microgyros: A High-Q In-Plane Silicon-On-Insulator Tuning Fork Device,” Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, June 2004, pp. 384-385.
  33. B.V. Amini, S. Pourkamali, M. Zaman, and F. Ayazi, “A New Input Switching Scheme for a Capacitive Micro-g Accelerometer,” Tech. Dig. 2004 Symposium on VLSI Circuits, Honolulu, HI, June 2004, pp. 310-313.
  34. A.O. Aggarwal, K. Naeli, P.M. Raj, F. Ayazi, S. Bhattacharya, and R.R. Tummala, “MEMS Composite Structures for Tunable Capacitors and IC-Package Nano-Interconnects,” in Proc. 54th Electronic Components and Technology Conference, Las Vegas, NV, June 2004, pp. 835-842.
  35. S. Pourkamali and F. Ayazi, “High Frequency Capacitive Micromechanical Resonators with Reduced Motional Resistance Using the HARPSS Technology,” in Tech. Dig. IEEE Topical Meeting on Si Monolithic ICs in RF Systems, Atlanta, GA, Sept. 2004, pp. 147-150.
  36. A. Sharma, M.F. Zaman, B.V. Amini, and F. Ayazi, “A High Q In-Plane Silicon-On-Insulator Tuning-Fork Gyroscope,” Proc. IEEE Sensors, Vienna, Austria, Oct. 2004, pp. 467-470.
  37. R. Sunier, P.Monajemi, F. Ayazi, H. Baltez, and O. Brand, "Precise Release and Insulation Technology for Vertical Hall Sensors and Trench-Defined MEMS," Proc. IEEE Sensors, Vienna, Austria, Oct. 2004, pp.1442-1445.
  38. G.K. Ho, K. Sundaresan, S. Pourkamali, and F. Ayazi, “Low-Motional-Impedance Highly-Tunable I2 Resonators for Temperature-Compensated Reference Oscillators,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘05), Miami, FL, Jan. 2005, pp. 116-120.
  39. S. Pourkamali, G. K. Ho, and F. Ayazi, “Vertical Capacitive SiBARs,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘05), Miami, FL, Jan. 2005, pp. 211-214.
  40. M. Rais-Zadeh, P. Monajemi, S. Yoon, J. Laskar, and F. Ayazi, “High-Q Integrated Inductors on Trenched Silicon Islands,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘05), Miami, FL, Jan. 2005, pp. 199-202.
  41. Z. Hao and F. Ayazi, “Support Loss in Micromechanical Disk Resonators,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘05), Miami, FL, Jan. 2005, pp. 137-141.
  42. P. Monajemi, P. Joseph, P. Kohl, and F. Ayazi, “A Low Cost Wafer-Level MEMS Packaging Technology,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘05), Miami, FL, Jan. 2005, pp. 634-637.
  43. M. Zaman, A. Sharma, B. Amini, and F. Ayazi, “The Resonating Star Gyroscope,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘05), Miami, FL, Jan. 2005, pp. 355-358.
  44. R. Abdolvand and F. Ayazi, “Single-Mask Reduced-Garp Capacitive Micromachined Devices,” in Proc. IEEE MicroElectro Mechanical Systems Conference (MEMS’05), Miami, FL, Jan. 2005, pp. 151-154.
  45. A. Salim, X. Huang, S. Humad, F. Ayazi, and B. Ziaie, “Adjustable Force Soft Landing Contact Lithography for Precision Patterning of Biomolecules,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS’05), Miami, FL, January 2005, pp. 770-773.
  46. P. Monajemi and F. Ayazi, “Thick Single Crystal Silicon MEMS with High Aspect Ratio Vertical Air Gaps,” Proc. SPIE Symposium on MOEMS-MEMS Micro & Nanofabrication, San Jose, CA, Jan. 2005, Vol. 5715, pp. 138-147.
  47. K. Sundaresan, G. K. Ho, S. Pourkamali, and F. Ayazi, “A Two-Chip 4-MHz Microelectromechanical Reference Oscillator,” Proc. 2005 IEEE International Symposium on Circuits and Systems (ISCAS 2005), Kobe, Japan, May 2005, pp. 5461-5464.
  48. P. Monajemi and F. Ayazi, “A High-Q Low-Voltage HARPSS Tunable Capacitor,” Proc. 2005 IEEE MTT-S International Microwave Symposium (IMS 2005), Long Beach, CA, June 2005, pp.749-752.
  49. B. Vakili Amini, R. Abdolvand, and F. Ayazi, “Sub-micro-gravity Capacitive SOI Microaccelerometers,” Digest of the 13th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers'05), Seoul, Korea, June 2005, pp. 515-518.
  50. Z. Hao and F.  Ayazi, “Thermoelastic  Damping  in Flexural-Mode  Ring  Gyroscopes,”  2005 ASME International Mechanical Engineering Congress and Exposition, Orlando, Nov. 2005, IMECE2005-79965.
  51. M. F. Zaman, A. Sharma and F. Ayazi, “High Performance Matched-Mode Tuning Fork Gyroscope,” Proc. 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2006), Istanbul, Turkey, Jan. 2006, pp. 66-69.
  52. Z.  Hao, R.  Abdolvand, and F. Ayazi,  “A  High-Q Length-Extensional   Bulk-Mode   Mass  Sensor  with  Annexed  Sensing Platforms,”  Proc. 19th IEEE International Conference on Micro Electro Mechanical  Systems  (MEMS2006),  Istanbul,  Turkey,  Jan. 2006, pp. 598-601.
  53. G. K. Ho, K. Sundaresan, S. Pourkamali, and F. Ayazi, "Temperature Compensated IBAR Reference Oscillators," Proc. 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey, Jan. 2006, pp. 910-913.
  54. B. Vakili Amini, R. Abdolvand and F. Ayazi, “A 4.5 mW Closed-Loop Delta-Sigma Micro-g CMOS-SOI Accelerometer,” in Tech. Digest IEEE International Solid-State Circuits Conference (ISSCC 2006), San Francisco, CA, Feb. 2006, pp. 288-289.
  55. P. Monajemi, P. Joseph, P. A. Kohl, and F. Ayazi, "Characterization of a Polymer-Based MEMS Packaging Technique," Proc. IEEE Advanced Packaging Materials (APM), Atlanta, GA, March 2006, pp.139-144.
  56. P.M. Raj, I.R. Abothu, R. Abdolvand, F. Ayazi, and R. Tummala, “Integrating Solution-Derived 3D PZT Structures on Si MEMS Platform for RF and Biomedical Applications,” Proc. IEEE Advanced Packaging Materials (APM), Atlanta, GA, March 2006, p.122.
  57. S. Pourkamali and F. Ayazi, “High frequency low impedance capacitive silicon BAR structures,” Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, June 2006, pp. 284-287.
  58. F. Ayazi, S. Pourkamali, G.K. Ho, and R. Abdolvand, “High-Aspect-Ratio SOI Vibrating Micromechanical Resonators and Filters,” Invited paper, Proc. 2006 IEEE MTT-S International Microwave Symposium (IMS 2006), San Francisco, CA, June 2006, pp 676-679.
  59. A. Sharma, M.F. Zaman, and F. Ayazi, “A 104dB SNDR Transimpedance-based CMOS ASIC for Tuning Fork Microgyroscopes,” Proc. of the IEEE Custom Integrated Circuits Conference (CICC 2006), Sept. 2006, pp. 655-658.
  60. K. Sundaresan, G.K. Ho, S. Pourkamali, and F. Ayazi, “A Low Phase Noise 100MHz Silicon BAW Reference Oscillator,” Proc. of the IEEE Custom Integrated Circuits Conference (CICC 2006), Sept. 2006, pp. 841-844.
  61. H. Johari and F. Ayazi, “Silicon-On-Insulator Bulk Acoustic Wave Disk Resonators,” Tech. Dig. IEEE Int. SOI Conference, Niagara Falls, NY, Oct. 2006, pp. 153-154.
  62. Z.  Hao,  M. F. Zaman,  A.  Sharma, and F. Ayazi, “Energy   Loss   Mechanisms   in a Bulk-Micromachined  Tuning  Fork Gyroscope,” Proc. IEEE Sensors 2006, Daegu, South Korea, Oct. 2006, pp. 1333-1336.
  63. R. Abdolvand, Z. Hao, and F. Ayazi, “Temperature-Compensated  ZnO-On-Diamond  Resonant  Mass Sensor,” Proc. IEEE Sensors 2006, Daegu, South Korea, Oct. 2006, pp. 1297-1300.
  64. H. Johari and F. Ayazi, "Capacitive Bulk Acoustic Wave Silicon Disk Gyroscopes," Tech. Dig. IEEE Int. Electron Devices Meeting (IEDM 2006), San Francisco, CA, Dec. 2006, pp. 513-516.
  65. M. Rais-Zadeh, P. A. Kohl, and F. Ayazi, “High-Q micromachined silver passives and filters,” Tech. Dig. IEEE Int. Electron Device Meeting (IEDM 2006), San Francisco, CA, Dec. 2006, pp. 727-730.
  66. M. Rais-Zadeh and F. Ayazi, “High-Q tunable silver capacitors for RFICs,”  Proc. 7th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2007), Long Beach, CA, Jan. 2007, pp. 169-172.
  67. M. Rais-Zadeh, P. A. Kohl, and F. Ayazi, “A packaged micromachined switched tunable inductor,” Proc. 20th IEEE Micro Electro Mechanical Systems Conf. (MEMS 2007), Kobe, Japan, Jan. 2007, pp. 799-802.
  68. H. Johari and F. Ayazi, "High Frequency Capacitive Disk Gyroscopes in (100) and (111) Silicon," Proc. 20th IEEE International Conf. on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan, Jan. 2007, pp. 47-50.
  69. R. Abdolvand, G.K. Ho, J. Butler, and F. Ayazi, “ZnO-on-nanocrystalline-diamond lateral bulk acoustic resonators,” Proc. 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan, Jan. 2007, pp. 795-798.
  70. G. K. Ho, J. K. C. Perng, and F. Ayazi, “Process Compensated Micromechanical Resonators,” Proc. 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan, Jan. 2007, pp. 183-186.
  71. G. K. Ho, R. Abdolvand, and F. Ayazi, “High Order Composite Bulk Acoustic Resonators,” Proc. 20th IEEE International Conf. on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan, Jan. 2007, pp. 791-794.
  72. A. Sharma, M.F. Zaman, and F. Ayazi, “A 0.2deg/hr Micro-Gyroscope with Automatic CMOS Mode Matching,” Tech. Digest IEEE International Solid-State Circuits Conference (ISSCC 2007), San Francisco, CA, Feb. 2007, pp. 386-387.
  73. R. Abdolvand and F. Ayazi, “Narrow-Band Monolithic Piezoelectric-on-Substrate Filter Technology,” in Proc. 2007 IEEE MTT-S International Microwave Symposium (IMS 2007), Honolulu, Hawaii, June 2007, pp. 509-512.
  74. M. Rais-Zadeh, H. Miri Lavassani, and F. Ayazi, “CMOS-Compatible Encapsulated Silver Bandpass Filters,” in Proc. 2007 IEEE MTT-S International Microwave Symposium (IMS 2007), Honolulu, Hawaii, June 2007, pp. 1301-1304.
  75. R. Abdolvand, H. Miri Lavassani, and F. Ayazi, “A Low Voltage Temperature-Stable Micromechanical Piezo Oscillator,”  Tech. Digest of the 14th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers'07), Lyon, France, June 2007, pp. 53-56.
  76. S. Pourkamali and F. Ayazi, “Wafer-Level Encapsulation and Sealing of Electrostatic HARPSS Transducers,” Proc. IEEE Sensors 2007, Atlanta, GA, Oct. 2007, pp. 49-52.
  77. A. Sharma, M. F. Zaman, and F. Ayazi, “A Smart Angular Rate Sensor System,” Proc. IEEE Sensors 2007, Atlanta, GA, Oct. 2007, pp. 1116-1119. (Best paper award)
  78. H. Miri Lavassani, R. Abdolvand, and F. Ayazi, “A 500MHz Low Phase Noise AlN-on-Silicon Reference Oscillator,” Proc. IEEE Custom Integrated Circuits Conference (CICC 2007), Sept. 2007, pp. 599-602.
  79. Q. Qin, S. Pourkamali, and F. Ayazi, “Capacitively Coupled VHF Silicon Bulk Acoustic Wave Filters,” IEEE International Ultrasonics Symposium, New York, NY, Oct. 2007, pp. 1649-1652.
  80. W. Pan, R. Abdolvand, and F. Ayazi, “Effect of Nonuniform Loading Layer on Monolithic Thickness-Mode Piezoelectric Filters,” IEEE International Ultrasonics Symposium, New York, NY, Oct. 2007, pp. 1645-1648.
  81. R. Abdolvand and F. Ayazi, “Enhanced Power Handling and Quality Factor in Thin-Film Piezoelectric-on-Substrate Resonators, IEEE International Ultrasonics Symposium, New York, NY, Oct. 2007, pp. 608-611.
  82.  R. Abdolvand, H. Miri Lavassani, and F. Ayazi, “Single-Resonator Dual-Frequency Thin-Film Piezoelectric-on-Substrate Oscillator,” Tech. Dig. IEEE Int. Electron Device Meeting (IEDM 2007), Washington, DC, Dec. 2007, pp. 419-422.
  83. W. Pan, R. Abdolvand, and F. Ayazi, “A low-loss 1.8GHz monolithic thin-film piezoelectric-on-substrate filter,” Proc. 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ, Jan. 2008, pp. 176-179.
  84. A. Sharma, M. F. Zaman, M. Zurcher, and F. Ayazi, "A 0.1degree/hr bias drift electronically matched tuning fork microgyroscope,” Proc. 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ, Jan. 2008, pp. 6-9.
  85. M. Rais-Zadeh and F. Ayazi, “Small-bandwidth integrated tunable bandpass filters for GSM applications,” Proc. 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ, Jan. 2008, pp. 1032-1035.
  86. M. Rais-Zadeh, A. K. Samarao, P. Monajemi, and F. Ayazi, “Low-voltage large-value tunable capacitors using self-aligned HARPSS,” Proc. 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ, Jan. 2008, pp. 319-322.
  87. H. Johari, J. Shah, and F. Ayazi, “High frequency XYZ-axis single-disk silicon gyroscope,” Proc. 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ, Jan. 2008, pp. 856-859.
  88. H. M. Lavassani, R. Abdolvand, and F. Ayazi, “Low phase noise UHF thin-film piezoelectric-on-substrate LBAR oscillators,” Proc. 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ, Jan. 2008, pp. 112-115.
  89. D. Zhao, M.F. Zaman, and F. Ayazi, “An Ultra-Low Noise Chopper-Stabilized Lateral BJT Interface Circuit in 0.6um CMOS for Capacitive Accelerometers,” Tech. Digest IEEE International Solid-State Circuits Conference (ISSCC 2008), San Francisco, CA, Feb. 2008, pp. 584-585.
  90. J. Shah, H. Johari, and F. Ayazi, “CMOS ASIC for MHz Silicon BAW Gyroscope,” Tech. Digest 2008 IEEE International Symposium on Circuits and Systems (ISCAS 2008), Seattle, WA, May 2008, pp. 2458-2461.
  91. W. Pan and F. Ayazi, “Multiple-Frequency Thickness-Mode Thin-Film Piezoelectric-on-Substrate Filter Array,” Tech. Digest 2008 IEEE International Frequency Control Symposium, Honolulu, HI, May 2008.
  92. R. Abdolvand and F. Ayazi, “High Frequency ZnO-on-Diamond Monolithic Filters,” Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, SC, June 2008, pp. 384-385.
  93.  J. Fang, J. Fu, and F. Ayazi, “Metal-Organic Thin-Film Encapsulation for Gravimetric Gas Microsensors,“ in Digest of The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2008), San Diego, CA, Oct. 2008, pp. 1690-1692.
  94. H. M. Lavasani, A. K. Samarao, G. Casinovi, and F. Ayazi, “A 145MHz Low Phase Noise Capacitive Silicon Micromechanical Resonator,” Tech. Dig. IEEE Int. Electron Device Meeting (IEDM 2008), San Francisco, CA, Dec. 2008, pp. 675-678.
  95. G. Casinovi, X. Gao, and F. Ayazi, “Analytical Modeling and Numerical Simulation of Capacitive Silicon Bulk Acoustic Resonators,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), Sorento, Italy, Jan. 2009, pp. 935-938.
  96. A. K. Samarao and F. Ayazi, “Post Fabrication Electrical Trimming of Silicon Bulk Acoustic Resonators using Joule Heating,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), Sorento, Italy, Jan. 2009, pp. 892-895.
  97. S. Lee, J. Cho, S. Lee, M.F. Zaman, F. Ayazi, and K. Najafi, “A Low Power Oven-Controlled Vacuum Package Technology for High Performance MEMS,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), Sorento, Italy, Jan. 2009, pp. 753-756.
  98. R. Tabrizian, M. Rais-Zadeh, and F. Ayazi, “Effect of phonon interactions on limiting the f.Q product of micromechanical resonators,” IEEE International Conference on Solid-state Sensors, Actuators and Microsystems (TRANSDUCERS’09), Denver, CO, June 2009, pp. 2131-2134.
  99. F. Ayazi, “MEMS for Integrated Timing and Spectral Processing,” Invited Paper, Proc. IEEE Custom Integrated Circuits Conference (CICC 2009), San Jose, CA, Sept. 2009, pp. 65-72.
  100. S. Horst, S. Phillips, H. M. Lavasani, F. Ayazi, J. D. Cressler, “SiGe digital frequency dividers with reduced residual phase noise,” Proc. IEEE Custom Integrated Circuits Conference (CICC 2009), San Jose, CA, Sept. 2009, pp. 251-254.
  101. A. K. Samarao and F. Ayazi, "Temperature Compensation of Silicon Micromechanical Resonators," IEEE International Electron Devices Meeting (IEDM 2009), Baltimore, MD, Dec. 2009, pp. 789-792.
  102. Y. Shim, R. Tabrizian, F. Ayazi, and M. Rais-Zadeh, “Low-loss MEMS filters with improved out-of-band rejection by exploiting inductive parasitics,” IEEE International Electron Device Meeting (IEDM’09), Baltimore, MD, Dec. 2009, pp. 3351-3353.
  103. A. K. Samarao, G. Casinovi and F. Ayazi, "Passive TCF Compensation in High Q Silicon Micromechanical Resonators," accepted for presentation at IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong Kong, Jan. 2010, pp.116-119.
  104. W. K. Sung, M. Dalal, and F. Ayazi, "A 3MHz Spoke Gyroscope with Wide Bandwidth and Large Dynamic Range," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong Kong, Jan. 2010 pp. 104-107.
  105. W. Pan and F. Ayazi, "Thin-Film Piezoelectric-on-Substrate Resonators with Q Enhancement and TCF Reduction," accepted for presentation at IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong Kong, Jan 2010, pp. 727-730.
  106. H. M. Lavasani, W. Pan, B. Harrington, R. Abdolvand, and F. Ayazi, “A 76dBΩ 1.7GHz 0.18μm CMOS Tunable Transimpedance Amplifier Using Broadband Current Pre-Amplifier for High Frequency Lateral Micromechanical Oscillators,” in Tech. Digest IEEE International Solid-State Circuits Conference (ISSCC 2010), San Francisco, CA, Feb. 2010, pp. 318-320.
  107.  H. M. Lavasani, W. Pan, and F. Ayazi, “An Electronically Temperature Compensated 427MHz Low Phase-Noise AlN-on-Si Micromechanical Reference Oscillators,” in IEEE Radio Frequency Integrated Circuits Symposium (RFIC 2010), Anaheim, CA, May 2010, pp. 329-332.
  108. A.K. Samarao and F. Ayazi, “Intrinsic Temperature Compensation of Highly Resistive High-Q Silicon Microresonators via Charge Carrier Depletion,” IEEE International Frequency Control Symposium (IFCS), Newport Beach, CA, June 2010, pp. 334-339. (Best Paper Award)
  109. R. Tabrizian, G. Casinovi, and F. Ayazi, "Temperature-Stable High-Q AlN-on-Silicon Resonators with Embedded Array of Oxide Pillars," Tech. Digest Solid-State Sensors, Actuators, and Microsystems Workshop, pp 100-101, Hilton Head, SC, USA, June 2010, pp. 100-101.
  110. A.K. Samarao and F. Ayazi, “Quality Factor Sensitivity to Crystallographic Misalignments in Silicon Micromechanical Resonators,” Tech. Digest Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, June 2010, pp. 479-482.
  111. J.L. Fu and F. Ayazi, "Dual-Mode Piezo-on-Silicon Resonant Temperature and Humidity Sensor for Portable Air Quality Monitoring Systems," Proc. IEEE SENSORS Conf., Waikoloa, Hawaii, Nov. 2010, pp. 2132-2135.
  112. A.K. Samarao and F. Ayazi, "Self-polarized capacitive silicon micromechanical resonators via charge trapping," IEEE International Electron Devices Meeting (IEDM 2010), San Francisco, CA, Dec. 2010, pp. 741-744.
  113. A.K. Samarao and F. Ayazi, "Combined Capacitive and Piezoelectric Transduction for High Performance Silicon Microresonators," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, Jan. 2011, pp. 169-172.  
  114. M.J. Dalal, J.L. Fu, and F. Ayazi, "Simultaneous Dual-Mode Excitation of Piezo-on-Silicon Micromechanical Oscillator for Self-Temperature Sensing," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, Jan. 2011, pp. 489-492.
  115. M. Pardo, L. Sorenson, W. Pan, and F. Ayazi, "Phase Noise Shaping Via Forced Nonlinearity in Piezoelectrically Actuated Silicon Micromechanical Oscillators," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, Jan. 2011, pp. 780-784.
  116. F.Ayazi, L. Sorenson, R. Tabrizian, “Energy Dissipation in Micromechanical Resonators,” Invited Paper, SPIE Defense, Security, and Sensing 2011, Proc. SPIE 8031, 803119 (2011), Orlando, FL, April 2011, pp. 1-13.
  117. G. K. Ho, S. Pourkamali and F. Ayazi, “Bulk Modes in Single Crystal Silicon,” Proceedings of the 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2011, pp. 20-25.
  118. R. Tabrizian and F.Ayazi, "Tunable Silicon Bulk Acoustic Resonators with Multi-Face AlN Transduction," Proceedings of the 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2011, pp. 749-752.
  119. D. E. Serrano, R. Tabrizian and F. Ayazi, "Tunable Piezoelectric MEMS resonators for Real-Time Clock," Proceedings of the 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2011, pp. 765-768.
  120. L. Sorenson, J.L. Fu, and F. Ayazi, "Linear Acoustic Bandgap Arrays for Spurious Mode Suppression in Piezoelectric MEMS Resonators," Proceedings of the 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2011, pp. 769-773.
  121. G. Casinovi, A.K. Samarao and F. Ayazi, “Compact Parametric Model of Capacitive BAW Resonators,” Proceedings of the 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2011, pp. 127-130.
  122. M. Pardo, L. Sorenson, and F. Ayazi, “A Phase-Noise Model for Nonlinear Piezoelectrically-Actuated MEMS Oscillators,” Tech. Digest 2011 IEEE International Symposium on Circuits and Systems (ISCAS 2011), Rio de Janeiro, Brazil, May 2011, pp. 221 - 224.
  123. M. Pardo and F. Ayazi, “A Band-Reject Nested-PLL Phase-Noise Reduction Scheme for Clock-Cleaners,” Tech. Digest 2011 IEEE International Symposium on Circuits and Systems (ISCAS 2011), Rio de Janeiro, Brazil, May 2011, pp. 470 – 473.
  124. R. M. Haque, D. E. Serrano, X. Gao, A. N.-Shirazi, V. Keesara, F. Ayazi and K. D. Wise, "Hermetic Packaging of Resonators with Vertical Feedthroughs Using a Glass-In-Silicon Reflow Process," Tech. Digest of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS’11), Beijing, China, June 2011, pp. 2303-2306.
  125. L. Sorenson, J.L. Fu, and F. Ayazi, "One-Dimensional Linear Acoustic Bandgap Structures for Performance Enhancement of AlN-on-Si Micromechanical Resonators," Tech. Digest of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS’11), Beijing, China, June 2011, pp. 918-921.
  126. W. K. Sung, M. Dalal, and F. Ayazi, "A Mode-Matched 0.9 MHz Single Proof-Mass Dual-Axis Gyroscope," Tech. Digest of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS’11), Beijing, China, June 2011, pp. 2821-2824.
  127. R. Tabrizian and F.Ayazi, "Laterally Excited Silicon Bulk Acoustic Resonator with Sidewall AlN," Tech. Digest of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS’11), Beijing, China, June 2011, pp. 1520-1523. (Best paper award)
  128. F. Ayazi, "Multi-DOF Inertial MEMS: From Gaming to Dead Reckoning," Invited Paper, Tech. Digest of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS’11), Beijing, China, June 2011, pp. 2805-2808.
  129. R. Tabrizian, V. Felmetsger, and F.Ayazi, "A Sidewall AlN Process for Efficient 3D Piezoelectric Transduction of MEMS," Tech. Digest of the Technologies for Future Micro/Nano Manufacturing, Napa, CA, August 2011, pp. 8-12.
  130. R. Tabrizian, M. Pardo, and F. Ayazi, "A 27 MHz Temperature Compensated MEMS Oscillator with Sub-ppm Instability," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, Jan. 2012, pp. 23-26.
  131. L. Sorenson, X. Gao, and F. Ayazi, "3-D Micromachined Hemispherical Shell Resonators with Integrated Capacitive Transducers," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, Jan. 2012, pp. 168-171. 
  132. G. Casinovi, W.K. Sung, M. Dalal, A. N. Shirazi, and F. Ayazi, "Electrostatic Self-Calibration of Vibratory Gyroscopes," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, Jan. 2012, pp. 559-562.
  133. J. Fu, Y. Nakano, L. Sorenson, and F. Ayazi, "Multi-Axis ALN-on-Silicon Vibration Energy Harvester with Integrated Frequency-Upconverting Transducers," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, Jan. 2012, pp. 1269-1272.
  134. F. Ayazi, R. Tabrizian and L. Sorenson, "Compensation, Tuning and Trimming of MEMS Resonators," Invited paper, IEEE International Frequency Control Symposium (IFCS 2012), Baltimore, MD, May 2012, pp 1-7.
  135. L. Sorenson and F. Ayazi, “A 100 MHz MEMS SiBAR Phase Modulator for Quadrature Phase Shift Keying,” IEEE International Frequency Control Symposium (IFCS 2012), Baltimore, MD, May 2012, pp. 1-4.
  136. V. Thakar, M. Rais-Zadeh, W. Pan, and F. Ayazi, “Monolithic Implementation of AlN-on-Silicon Bandpass Filters with a High-Q Notch within the Passband,” IEEE International Frequency Control Symposium (IFCS 2012), Baltimore, MD, May 2012, pp. 1-5.
  137. Y. Jeong and F. Ayazi, "Process Compensated CMOS Temperature Sensor for Microprocessor Application" Tech. Digest 2012 IEEE International Symposium on Circuits and Systems (ISCAS 2012), Seoul, Korea, May 2012, pp. 3128-3121.
  138. R. Tabrizian and F. Ayazi, "Reconfigurable SiBAR Filters with Sidewall Aluminum Nitride Signal Transduction," Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2012), Hilton Head Island, SC, June 2012, pp 98-99.
  139. P. Shao, L. Sorenson, X. Gao and F. Ayazi, “Wineglass-on-a-chip,” Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2012), Hilton Head Island, SC, June 2012, pp. 275-278.
  140. M. Dalal, A. N. Shirazi, W. K. Sung, G. Casinovi, and F. Ayazi, “Novel Readout Scheme for MEMS Vibratory Gyroscopes Based on Signal Phase Shift,” Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2012), Hilton Head Island, SC, June 2012, pp. 328-331.
  141. L. Sorenson, P. Shao, and F. Ayazi, “Effect of Thickness Anisotropy on Degenerate Modes in Oxide Micro-Hemispherical Shell Resonators,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwain, Jan. 2013, pp. 169-172. (Best oral paper award)
  142. Y. Jeong, D. E. Serrano, V. Keesara, W. K. Sung, and F. Ayazi, "Wafer Level Vacuum-packaged Tri-axial Accelerometer with Nano Airgaps" IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwan, Jan. 2013, pp. 33-36.
  143. A. N. Shirazi, G. Casinovi, M. Dalal, and F. Ayazi, "Combined Phase-Readout and Self-Calibration of MEMS Gyroscopes," Tech. Digest of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS’13), Barcelona, Spain, June 2013, pp. 960-963.
  144. B. Hamelin, V. Tavassoli, and F. Ayazi, "Eutectic Trimming of Polysilicon Micro Hemispherical Resonating Gyroscope", Proc. IEEE Sensors 2013, 3-6 Nov. 2013, p. 1339-1342.
  145. Y. Jeong and F. Ayazi "A Novel Offset Calibration Method to suppress Capacitive Mismatch in MEMS Accelerometer", 9th Samsung Electro-mechanics 1nside Edge Best Paper Award 2013, Suwon, Korea, Nov. 2013. (Bronze prize)
  146. R. Tabrizian and F. Ayazi, "Acoustically-Engineered Multi-Port AlN-on-Silicon Resonators for Accurate Temperature Sensing," IEEE International Electron Devices Meeting (IEDM 2013), Washington, DC, Dec. 2013, pp. 1811-1814.
  147. R. Tabrizian and F. Ayazi, “Dual-Mode Vertical Membrane Resonant Pressure Sensor,” IEEE International Micro Electro Mechanical Systems Conference (MEMS 2014), San Francisco, CA, January 2014, pp. 120-123. (Best oral paper award)
  148. N. Mehanathan, V. Tavassoli, P. Shao, L. Sorenson and F. Ayazi, “Invar-36 Micro Hemispherical Shell Resonators,” IEEE International Micro Electro Mechanical Systems Conference (MEMS 2014), San Francisco, CA, January 2014, pp. 40-43.
  149. D.E. Serrano, Y. Jeong, V. Keesara, W.K. Sung and F. Ayazi, “Single Proof-mass Tri-Axial Pendulum Accelerometers Operating in Vacuum,” IEEE International Micro Electro Mechanical Systems Conference (MEMS 2014), San Francisco, CA, January 2014, pp. 28-31.
  150. P. Shao, V. Tavassoli, C. Liu, L. Sorenson, and F. Ayazi, “Electrical Characterization of ALD-coated Silicon Dioxide Micro-hemispherical Shell Resonators," IEEE International Micro Electro Mechanical Systems Conference (MEMS 2014), San Francisco, CA, January 2014, pp. 612-615.
  151. L. Sorenson, and F. Ayazi, “Effect of structural anisotropy on anchor loss mismatch and predicted case drift in future micro-Hemispherical Resonator Gyros,” IEEE Position, Location and Navigation Symposium (PLANS 2014), Monterey, CA, May 2014, pp. 493-498.
  152. R. Tabrizian A. N. Shirazi, and F. Ayazi, "Temperature-Compensated tetherless bulk acoustic phonon trap for self-ovenized oscillators," Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2014), Hilton Head Island, SC, June 2014, pp 109-110.
  153. A. Mirbeik, V. Tavassoli, F. Ayazi, and N. Tavassolian, “Three-dimensional super-wideband micro-antenna for high-resolution millimeter-wave medical imaging,” 36th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC), Aug. 2014, pp. 4999-5002.
  154. M. Hodjat-Shamami, A. N. Shirazi, R. Tabrizian and F. Ayazi, “A dynamically mode-matched piezoelectrically transduced high-frequency flexural disk gyroscope, IEEE International Micro Electro Mechanical Systems Conference (MEMS 2015), Estoril, Portugal, January 2015, pp. 789-792.
  155. R. Mirjalili, H. Wen, D.E. Serrano, and F. Ayazi, "Substrate-decoupled silicon disk resonators having degenerate gyroscopic modes with Q in excess of 1-million," Tech. Digest of the 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS’15), Anchorage, AK, June 2015, pp. 15-18.
  156. A. Norouzpour-Shirazi, D.E. Serrano, M.F. Zaman, G. Casinovi, F. Ayazi, "A Dual-mode Gyroscope Architecture with In-run Mode-matching Capability and Inherent Bias Cancellation," Tech. Digest of the 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'15), Anchorage, AK, pp.23-26, June 2015.
  157. A. Mirbeik, N. Tavassolian, V. Tavassoli, F. Ayazi, “Ultra-wideband, dual-mode millimeter-wave micro hemispherical shell antenna,” 2015 IEEE International Symposium on Antennas and Propagation & USNC/URSI National Radio Science Meeting, Oct. 2015, pp. 2073-2074.
  158. B. Hamelin, V. Tavassoli, and F. Ayazi, "Highly-Symmetric Silicon Dioxide Shallow Shell Resonators with Angstrom-level Roughness", Proc. IEEE Sensors 2015, Nov. 2015, p. 1203-1206.
  159. C. Liu, R. Tabrizian, and F. Ayazi, "Temperature Compensated MEMS Oscillator using Structural Resistance Based Temperature Sensing", Proc. IEEE Sensors 2015, Nov. 2015, p. 1409-1412.
  160. B. Hamelin, L. Li, A. Daruwalla, C. Wong, and F. Ayazi, “High-Aspect-Ratio Sub-Micron Trench Etching on SOI Using Wet Metal-Assisted Chemical Etching (MaCE) Process,” IEEE International Micro Electro Mechanical Systems Conference (MEMS 2016), Shanghai, China, January 2016, pp. 447-450.
  161. S. Wisher, P. Shao, A. Norouzpour-Shirazi, Y. Yang, E. Ng, I. Flader, Y. Chen, D. Heinz, T. Kenny, and F. Ayazi, “A High-Frequency Epitaxially Encapsulated Single-Drive Quad-Mass Tri-Axial Resonant Tuning Fork Gyroscope,” IEEE International Micro Electro Mechanical Systems Conference (MEMS 2016), Shanghai, China, January 2016, pp. 930-933.
  162. H. Wen, A. Daruwalla, R. Mirjalili and F. Ayazi, “HARPSS-fabricated nano-gap comb-drive for efficient linear actuation of high frequency BAW resonators,” IEEE International Micro Electro Mechanical Systems Conference (MEMS 2016), Shanghai, China, January 2016, pp. 1014-1017.
  163. B. Hamelin, A. Daruwalla, and F. Ayazi, “Stiffness Trimming of High Q MEMS Resonators by Excimer Laser Annealing of Germanium Thin Film on Silicon,” IEEE International Micro Electro Mechanical Systems Conference (MEMS 2016), Shanghai, China, January 2016, pp. 1026-1029.
  164. D. E. Serrano, R. Lipka, D. Younkin, P. Hrudey, J. Tovera, A. Rahafrooz, M. F. Zaman, S. Nagpal, I. Jafri, F. Ayazi, "Environmentally-robust high-performance tri-axial bulk acoustic wave gyroscopes", Proc. IEEE/ION Position, Location and Navigation Symposium (PLANS) 2016, Apr. 2016, p. 5-8.
  165. H. Wen, S. Wisher, and F. Ayazi, "AN ANISOTROPIC-WET-ETCHED PITCH OR ROLL MODE-MATCHED GYROSCOPE WITH SLANTED QUADRATURE-CANCELLATION ELECTRODES," Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2016), Hilton Head Island, SC, June 2016, pp. 226-229.

Patents

Issued Patents

  1. F. Ayazi, G. Piazza, R. Abdolvand, G.K. Ho, and S. Humad, “Piezoelectric on Semiconductor-On-Insulator Microelectromechanical Resonators,” US patent 6,909,221, issue date June 21, 2005.
  2. F. Ayazi and S. Pourkamali, “Capacitive Resonators and Method of Fabrication,” US patent 7,023,065, issue date April 4, 2006.
  3. F. Ayazi and M. F. Zaman, “High Resolution In-Plane Tuning Fork Gyroscope and Methods of Fabrication,” US patent 7,043,985, issue date May 16, 2006.
  4. F. Ayazi, R. Abdolvand, and S. Pourkamali, “Methods of Forming Oxide Masks with Submicron Openings and Microstructures Formed Thereby,” US patent 7,056,757, issue date June 6, 2006.
  5. F. Ayazi and S. Pourkamali, “Electrically-Coupled Micro-Electro-Mechanical Filter Systems and Methods,” US patent 7,098,757, issue date August 29, 2006.
  6. F. Ayazi, S. Pourkamali, and G. K. Ho, “Capacitive Vertical Silicon Bulk Acoustic Resonator (SiBAR),” US patent 7,176,770, issue date February 13, 2007.
  7. F. Ayazi, B. Vakili Amini, and R. Abdolvand, “Capacitive microaccelerometers and fabrication methods,” US patent 7,337,671, issue date March 4, 2008.
  8. F. Ayazi, M. F. Zaman, A. Sharma, and B. Vakili Amini, “Resonating Star Gyroscope,” US patent 7,360,423, issue date April 22, 2008.
  9. G. K. Ho, F. Ayazi, S. Pourkamali, and K. Sundaresan, “Highly Tunable Low-Impedance Capacitive   Micromechanical Resonators, Oscillators, and Processes Relating Thereto,” US patent 7,511,870, issue date March 31, 2009.
  10. F. Ayazi and H. Johari, “Capacitive Bulk Acoustic Wave Gyroscopes,” US patent 7,543,496, issue date June 9, 2009.
  11.  G. K. Ho and F. Ayazi, “Process compensated micromechanical resonators,” US patent 7,564,162, issue date July   21, 2009.
  12. F. Ayazi, G.K. Ho and R. Abdolvand, “Lithographically-Defined Multi-Standard Multi Frequency High Q   Tunable  Micromechanical Resonators,” US patent 7,639,105, issue date December 29, 2009.
  13. F. Ayazi, B. Vakili Amini, and R. Abdolvand, “Capacitive microaccelerometers and fabrication methods,” US patent 7,757,393, issue date July 20, 2010.
  14. F. Ayazi, “Method for Sealing and Backside Releasing of Microelectromechanical Systems,” US patent 7,767,484, issue date August 3, 2010.
  15. F. Ayazi, R. Abdolvand, H. Mirilavasani, “Single-resonator dual-frequency lateral-extension mode piezoelectric oscillators, and operating methods thereof,” US patent 7,800,282, issue date September 21, 2010.
  16. F. Ayazi and R. Abdolvand, “Piezo-on-diamond resonators and resonator systems,” US patent 7,812,692, issue date October 12, 2010.
  17. Z. Hao, and F. Ayazi, “High-Q Longitudinal Block Resonators with Annexed Platform for Mass Sensing Applications,” US patent 7,819,011, issue date October 26, 2010.
  18. F. Ayazi, G.K. Ho and R. Abdolvand, “Lithographically-Defined Multi-Standard Multi Frequency High Q Tunable Micromechanical Resonators,” US patent 7,843,284, issue date November 30, 2010.
  19. F. Ayazi, M. Rais-Zadeh, and P. Kohl, “MEMS switched tunable inductors,” US patent 7,847,669, issue date December 7, 2010.
  20. F. Ayazi and R. Abdolvand, “Monolithic Thin-Film Piezoelectric Filters,” US patent 7,847,656, issue date December 7, 2010.
  21. G. K. Ho and F. Ayazi, “Low frequency process-variation-insensitive temperature compensated temperature-stable micromechanical resonators,” US patent 7,859,365, issue date December 28, 2010.
  22. F. Ayazi, L. Sorenson, “Thin-Film Piezoelectric-on-Insulator Resonators Having Perforated Resonator Bodies Therein,” US patent 7,888,843, issue date February 15, 2011.
  23. F. Ayazi, G.K. Ho, R. Abdolvand, “Micromechanical Bulk Acoustic Mode Resonators Having Interdigitated Electrodes and Multiple Pairs of Anchor Supports,” US patent 7,924,119, issue date April 12, 2011.
  24. F. Ayazi and M. Rais-Zadeh, “Micro-electromechanical voltage tunable capacitor and filter devices,” US patent 7,933,112, issue date April 26, 2011.
  25. F. Ayazi, M. Rais-Zadeh, and P. Monadgemi, “Microelectromechanical Systems Structures and Self-Aligned HARPSS Fabrication Processes for Producing Same,” US patent 7,977,136, issue date July 12, 2011.
  26. F. Ayazi, H. Miri Lavassani, “Integrated Circuit Oscillators Having Microelectromechanical Resonators Therein with Parasitic Impedance Cancellation,” US patent 8,022,779, issue date September 20, 2011.
  27. F. Ayazi, and A. Samarao, “Micro-electromechanical resonators having electrically-trimmed resonator bodies therein and methods of fabricating same using joule heating,” US patent 8,061,013, issue date November 22, 2011.
  28. F. Ayazi, A. Sharma, and F. Zaman, “Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope,” US patent 8,061,201, issue date November 22, 2011.
  29.  F. Ayazi, and A. Samarao, “MEMS resonators having resonator bodies therein with concave-shaped sides that support high Quality factor and low temperature coefficient of resonant frequency,” US patent 8,063,720, issue date November 22, 2011.
  30. F. Ayazi and H. Johari, “Bulk Acoustic Wave Gyroscopes,” US patent 8,166,816, issue date May 1, 2012.
  31. M. R. Pulugurtha, D. Balaraman, I. R. Abothu, R. Tummala and F. Ayazi, “Integrating Three-Dimensional High Capacitance Density Structures,” US patent 8,174,017, issue date May 8, 2012.
  32. F. Ayazi, R. Abdolvand, H. Miri Lavassani, “Oscillator having micro-electromechanical resonators and driver circuits therein that support in-phase and out-of-phase signals,” US patent 8,242,663, issue date August 14 20, 2012.
  33. F. Ayazi, and A. Samarao, “Methods of forming micro-electromechanical resonators having boron-doped resonator bodies containing eutectic alloys,” US patent 8,354,332, issue date January 15, 2013.
  34. F. Ayazi, R. Tabrizian, and G. Casinovi, “Methods of forming micromechanical resonators having high density trench arrays therein that provide passive temperature compensation,” US patent 8,381,378, issue date February 26, 2013.
  35. P. Kohl, F. Ayazi, and P.J. Joseph, “Packaging for micro-electro-mechanical systems and methods of fabricating thereof,” US patent 8,405,170, issue date March 26, 2013.
  36. F. Ayazi and D. E. Serrano, “Tunable Piezoelectric MEMS Resonators Suitable for Real-Time Clock Applications,” US patent 8,450,913, issue date May 28, 2013.
  37. P. Kohl, F. Ayazi, and P.J. Joseph, “Packaging for micro-electro-mechanical systems and methods of fabricating thereof,” US patent 8,476,096, issue date July 2, 2013
  38. F. Ayazi and R. Tabrizian, “Micromechanical Resonators Having Piezoelectric Layers therein that Support Actuation and Sensing through a Longitudinal Piezoelectric Effect,” US patent 8,519,598, issue date August 27, 2013
  39. F. Ayazi, “Bulk Acoustic Wave Accelerometers,” US patent 8,528,404, issue date September 10, 2013.
  40. F. Ayazi, L. Sorenson, and J. Fu, “Piezoelectric-on-Semiconductor Micromechanical Resonators with Linear Acoustic Bandgap Tethers,” US patent 8,624,471, issue date January 7, 2014.
  41. F. Ayazi, A. Sharma, and F. Zaman, “Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope,” US patent 8,677,821, issue date March 25, 2014.
  42. F. Ayazi, L. Sorenson, and J. Fu, “Piezoelectric Micromechanical Energy Harvesters,” US patent 8,680,752, issue date March 25, 2014.
  43. G. Casinovi, F. Ayazi, W.K. Sung, M. Dalal, A. N. Shirazi, “Method and Apparatus for Self Calibration of Gyroscopes,” US patent 8,763,441, issue date July 1, 2014.
  44. F. Ayazi and D. Agrawal, “High-Q Mode-Matched Vibratory Tuning Fork Based Six-Degrees of Freedom Inertial Measurement MEMS Device,” US patent 9,003,882, issue date April 14, 2015.
  45. F. Ayazi and A. K. Samarao, “Self Polarized Capacitive Silicon Micromechanical Resonator Apparatus and Fabrication Method,” US patent 9,154,108, issue date October 6, 2015.
  46. F. Ayazi, “Bulk Acoustic Wave Accelerometers,” US patent 9,279,824, issue date March 8, 2016.
  47. F. Ayazi and A. K. Samarao, “Temperature Compensation in a Semiconductor Micromechanical Resonator Via Charge Carrier Depletion, US patent 9,319,020, issue date April 19, 2016.
  48. R. Tabrizian and F. Ayazi, “Acoustically-Engineered Multi-Port Piezoelectric-on-Semiconductor Resonators for Accurate Temperature Sensing and Reference Signal Generation,” US patent 9,318,998, issue date April 19, 2016.
  49. F. Ayazi and A. K. Samarao, “Microelectromechanical resonators having degenerately-doped and/or eutectic alloy resonator bodies therein,” US patent 9,331,264, issue date May 3, 2016.
  50. G. Casinovi, F. Ayazi, W.K. Sung, M. Dalal, A. N. Shirazi, “Method and Apparatus for Self Calibration of Gyroscopes,” US patent 9,347,775, issue date May 24, 2016.

Pending Patents

  1. F. Ayazi, and W. K. Sung, “Increasing Bandwidth and Dynamic Range by Spoke Structure in Bulk Acoustic Wave MHz Gyroscopes,” Pending US patent application, GTRC ID 4968, filing date August 2009.
  2. F. Ayazi, W.K. Sung, and M.F. Zaman, "A mode-matched 0.9MHz single proof-mass dual-axis gyroscope," Pending US patent application, GTRC ID 5492, filing date December 2010.
  3. F. Ayazi and R. Tabrizian, “Reconfigurable SiBAR Filters with Sidewall Piezoelectric Transduction,” Provisional Patent Application, GTRC ID 5990, filed May 2, 2012.
  4. R. Tabrizian and F. Ayazi, “High-Frequency AlN-on-Silicon Resonant Square Gyroscopes,” GTRC ID 6375, filing date June 14, 2013.
  5. R. Tabrizian and F. Ayazi, “Acoustically-Engineered Multi-Port Piezoelectric-on-Semiconductor Resonators for Accurate Temperature Sensing and Reference Signal Generation,” Pending US patent application, GTRC ID 6423, filings date July 15, 2013.
  6. R. Tabrizian and F. Ayazi, “Dual-Mode Vertical Membrane Resonant Pressure Sensor,” GTRC ID 6520, filing date November 22, 2013.