Research Pillars
4H-Silicon Carbide
High-Q Resonators
Inertial Measurement
Machine Learning
4H-Silicon Carbide
Our research in 4H-SiC demonstrates transverse isotropy, superior temperature-dependent mechanical properties, Silicon Carbide-on-Insulator (SiCOI), and Deep Reactive Ion Etching (DRIE) availability, highlighting its potential as an advanced acoustic material for MEMS.
High-Q Resonators
The driving force behind the commercial success and growth of MEMS resonators is the advance research in microfabrication processes, materials, devices, and system design. High-Q designs provide higher accuracy for sensing, higher stability in timing, and higher selectivity in filtering applications.
Read more:
- A Review of Eigenmode and Frequency Control in Piezoelectric MEMS Resonators
A Low Phase Jitter MEMS Oscillator With Centrally Anchored Piezoelectric Resonator for Wide Temperature Range Real-Time Clock Applications
HEAVILY-DOPED DUAL-MODE DISTRIBUTED LAMÉ RESONATOR (DLR) FOR TEMPERATURE-COMPENSATED MEMS OSCILLATORS
Inertial Measurement Units (IMUs)
MEMS play a significant role in inertial and vibration sensing due to their small size and weight, low power consumption, and low cost (SWaP-C). Our implementation of high-performance inertial measurement units (IMU) has greatly boosted the wearable sensors sensing capabilities to continuously monitor minute physiological signals that account for acoustic signature of heart and lung.
Machine Learning
Our research shows that machine learning algorithms significantly enhance the accuracy and reliability of MEMS sensors by effectively modeling complex patterns and relationships. Their efficiency makes them suitable for applications with limited processing power and battery life, such as consumer electronics, health monitoring, and environmental monitoring.